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Title: Interferometer Sensor
Description: Nicholas Dagalakis and Yong-sik Kim developed an interferometer sensor that uses a laser to measure the displacement of moving objects with high precision. This invention has proven to be particularly useful for tracking moving parts in microelectromechanical systems (MEMS) devices.

-EL

See also http://www.nist.gov/director/patents-032614.cfm.
Subjects (names):
Topics/Categories:
Type: Graphic/illustration
Source: National Institute of Standards and Technology
Credit Line as it should
appear in print:
Credit: NIST
AV Number: 14EL005
Date Created: Unknown
Date Entered: 3/26/2014

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