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Title: FinFET transistors
Description: These three-dimensional tri-gate (FinFET) transistors are among the 3-D microchip structures that could be measured using through-focus scanning optical microscopy (TSOM).

See also http://www.nist.gov/pml/div683/tsom-062513.cfm.
Subjects (names):
Topics/Categories:
Type: Photo/B&W
Source: National Institute of Standards and Technology
Credit Line as it should
appear in print:
Courtesy Intel Corporation
AV Number: 13PML026
Date Created: Unknown
Date Entered: 6/25/2013

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