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A micromachine called a scratch drive actuator, labeled with fluorescent dots, (top) rests atop a platform underlain by an electric circuit that initiates the device?s step-by-step movements. Under a fluorescence microscope, the nanoparticles appear as points of light in a starlike constellation (bottom), making it possible to measure small changes in the position and orientation of the device at each step.
*PML
See also http://www.nist.gov/pml/div683/mems-101612.cfm.
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