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Title: Nanoimprint Lithography Tests
Description: Electron micrograph shows a cross-section of a typical SOG microcircuit feature. Nanoporous regions in the interior are lighter. The process forms a dense, stronger skin about 2 nanometers thick on the outside. (Color added for clarity.)

*MSEL
Subjects (names):
Topics/Categories: Nanotechnology--Materials
Type: Graphic/scientific data
Source: National Institute of Standards and Technology
Credit Line as it should
appear in print:
Credit: NIST
AV Number: 08MSEL006
Date Created: April 2008
Date Entered: 4/29/2008

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